| 摘要 |
PROBLEM TO BE SOLVED: To obtain satisfactory curvature in a reflection surface and to enable high densification. SOLUTION: This device is constituted by having a piezoelectric element 30 which consists of a piezoelectric body layer 33 and a pair of electrodes 32, 34 between which the piezoelectric body layer is held, and having a mirror element 20 which has a mirror film structure which reflects light and a driving element which is disposed corresponding to the mirror element 20. In such a case, the mirror element 20 is supported via a supporting part 25 on one side of end parts of the piezoelectric element 30 in the state of cantilever on a substrate 11, the supporting part 25 consists of a piezoelectric element 30A which is disposed continuously to the piezoelectric element 30 which constitutes the mirror element 20 and, therefore, the amount of deformation of the mirror element 20 is improved.
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