| 摘要 |
<p>PROBLEM TO BE SOLVED: To enable formation of a dense and high-dielectric strength dielectric layer. SOLUTION: An electrostatic chuck is constituted, into such a structure that an electrode layer 2 is formed on a dielectric base material 1 and a dielectric layer 3 is formed, in such a way as to cover this layer 2. In this case, the layer 2 and/or the layer 3 are or is formed by a gas deposition method. Or it is preferable that the layer 2 and/or the layer 3 are or be formed by spraying a powder body on the base material 1 from a nozzle along with gas.</p> |
