| 摘要 |
<p>A crystallization method is provided to extend the crystal duration time and obtain the crystal of large grain size of the large particle by lengthening the scanning time of the pulse laser light. The phase modulation device(2) is installed between the illuminator system(3) and the crystal optical system(4). The illuminator system comprises the light source(31) outputting the energy light for fusing the non-single crystal semiconductor film of the processed substrate(5), the beam splitter(32) of the light division means, two attenuators(33,35), the beam splitter(34) of the optical composing means and illumination optical system(37).</p> |
