发明名称 ETCHING DEVICE OF GLASS SUBSTRATE FOR DISPLAY)
摘要 An etching device of glass substrate for display is provided to increase smoothness of a surface of a glass substrate by uniformly streaming an etching liquid with overflow type on a top of the glass substrate. An etching device of glass substrate for display comprises an etching space part(100) and an etching liquid supply part(200). A plurality of glass substrates(G) is vertically arranged in the etching space part. A side shielding film(110) and an etching liquid returning bath(120) are included in a side part and a bottom part of the etching space part. The etching liquid supply part comprises a supply tube body(210) and an etching liquid inflow tube(220). The etching liquid inflow tube is installed in a center inside the supply tube body. An etching liquid is uniformly filled with a space inside the supply tube body through the etching liquid inflow tube.
申请公布号 KR100887344(B1) 申请公布日期 2009.03.06
申请号 KR20070118909 申请日期 2007.11.21
申请人 ACE HIGHTECH CO., LTD. 发明人 JANG, JEONG SU
分类号 H01L21/3063 主分类号 H01L21/3063
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