| 摘要 |
PURPOSE: An apparatus for separating cleaning water of a chemical mechanical polishing(CMP) equipment is provided to save deionized pure water and money, by dividing water drained after a cleaning process into pure water and waste water for recycling. CONSTITUTION: A conduit A is installed between a water collecting tank(2) and a waste-water treatment place(1). A conduit B is installed between the conduit A and a polisher(4). The first detecting sensor(6) for detecting a purity of water exhausted from the polisher is installed on the conduit B. A three directional valve is installed between the conduits A and B. The water collecting tank and a pond for a reclaim are connected by a conduit C having a pump(10) and a valve(11). A valve C(13), a filter(14), an ion exchanger(15), a valve D and a conduit D having a valve E are installed between the conduit C and a deionized water inflow hole. A conduit E(18) is connected between the conduit D and the polisher wherein the conduit D is between the valve D(16) and the valve E(17).
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