发明名称 PROCEDE DE PROTECTION DE PUCES DE CIRCUIT INTEGRE PAR DEPOT DE COUCHE MINCE ISOLANTE
摘要 The invention relates to a method for protecting integrated circuit chips (100) on a silicon wafer, comprising the following stages: cutting the silicon wafer in such a way as to separate the integrated circuit chips (100); depositing an electrically insulating material (150) on the back panel (104) and the sides (106) of each integrated circuit chip (100) in the form of a thin layer. This thin layer can be deposited using known techniques, especially by cathode sputtering or by vacuum evaporation.
申请公布号 FR2797996(A1) 申请公布日期 2001.03.02
申请号 FR20000002351 申请日期 2000.02.24
申请人 GEMPLUS 发明人 PATRICE PHILIPPE;PAPAPIETRO MICHEL
分类号 H01L21/316;H01L21/56;H01L21/58;H01L21/68;H01L23/29;H01L23/31 主分类号 H01L21/316
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