发明名称 |
PROCEDE DE PROTECTION DE PUCES DE CIRCUIT INTEGRE PAR DEPOT DE COUCHE MINCE ISOLANTE |
摘要 |
The invention relates to a method for protecting integrated circuit chips (100) on a silicon wafer, comprising the following stages: cutting the silicon wafer in such a way as to separate the integrated circuit chips (100); depositing an electrically insulating material (150) on the back panel (104) and the sides (106) of each integrated circuit chip (100) in the form of a thin layer. This thin layer can be deposited using known techniques, especially by cathode sputtering or by vacuum evaporation. |
申请公布号 |
FR2797996(A1) |
申请公布日期 |
2001.03.02 |
申请号 |
FR20000002351 |
申请日期 |
2000.02.24 |
申请人 |
GEMPLUS |
发明人 |
PATRICE PHILIPPE;PAPAPIETRO MICHEL |
分类号 |
H01L21/316;H01L21/56;H01L21/58;H01L21/68;H01L23/29;H01L23/31 |
主分类号 |
H01L21/316 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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