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发明名称
Verfahren zur selektiven Herstellung von Halbleitergebieten
摘要
申请公布号
DE69517629(T2)
申请公布日期
2001.03.01
申请号
DE1995617629T
申请日期
1995.04.18
申请人
MOTOROLA, INC.
发明人
STEELE, JOHN W.;DE FRESART, EDOUARD;THEODORE, DAVID N.
分类号
H01L21/205;H01L21/20;H01L27/06;(IPC1-7):H01L21/20
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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