发明名称 |
SILYLATION METHOD FOR REDUCING CRITICAL DIMENSION LOSS AND RESIST LOSS |
摘要 |
A method for reducing critical dimension loss and resist loss dimensions during etching includes providing a dielectric layer (12) having an anti-reflection layer (14) formed thereon and patterning a resist layer (16) on the anti-reflection layer. The resist layer is exposed to an agent including silicon, and the agent is reacted with the resist to form a silylation region (18) on exposed surfaces of the resist layer. The anti-reflection layer is etched by employing the silylation regions as an etch mask wherein the silylation regions have a greater resistance to etching than the antireflection layer and the resist layer.
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申请公布号 |
WO0114933(A1) |
申请公布日期 |
2001.03.01 |
申请号 |
WO2000US21537 |
申请日期 |
2000.08.07 |
申请人 |
INFINEON TECHNOLOGIES NORTH AMERICA CORP.;INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
LU, ZHIJIAN;MOREAU, WAYNE |
分类号 |
H01L21/027;H01L21/311;H01L21/768;(IPC1-7):G03F7/26 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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