发明名称 Appts to press a sealing profile into place at the box side of packaging for semiconductor wafers has a pressing projection around the sliding plate to press the profile in a holding ring into a groove around the holding plate
摘要 The appliance to press an elastic sealing profile into the groove at the box side of a packaging, for semiconductor wafers, has a base plate (1), a sliding plate (2), a holding plate (3), a holder ring (4), a pneumatic linear unit (5) and two holding clips (6). The pneumatic linear unit (5) is mounted to the base plate (1), and the base plate (1) has a screwed attachment to the holding plate (2) and holder ring (4) through distance bolts (7). The sliding plate (2) has vertical movement through the pneumatic linear unit (5) between the base plate (1) and the holding plate (3). The sliding plate (2) has a pressing projection (8) around its upper side to press into a groove (9) in the holding plate (2) to give a side holding action on the box side (10). A gap (11) runs around between the holding plate (3) and the holding ring (4) to hold the sealing profile with the pressing projection (8). The clips (6) swing on the base plate (1).
申请公布号 DE10028364(A1) 申请公布日期 2001.03.01
申请号 DE20001028364 申请日期 2000.06.08
申请人 WACKER SILTRONIC GESELLSCHAFT FUER HALBLEITERMATERIALIEN AG 发明人 AIGNER, ALOIS;HUBER, RICHARD;PFISTER, RUDOLF
分类号 B23P19/08;B25B27/00;B25B27/06;(IPC1-7):B23P19/04 主分类号 B23P19/08
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