| 摘要 |
<p>A multi-UV beam laser processing system uses at least first and second UV laser (30, 60, 90) beams (32, 34; 62, 64; 92, 94) from a single engine solid-state laser. The UV laser beams are directed to a work surface forsimultaneous processing resulting increased throughput. The solid-state laser (36, 66, 96) first generates a2nd harmonic green laser beam and then a non-linear crystal ('NLC') (42, 66, 98) generates a first UV beam. Because NLCs have limited conversion efficiency, the UV beam contains 'left over' fundamental and green laser power. Wavelength selective optics (108, 89, 108) separate the UV from the left over power, which is then converted by a second NLC (50, 114) into a second UV beam. Wavelength selective optics are used to separate out a second UV beam. The orientation of waveplates in front of each NLC controls their conversion efficiency so that the power levels of the first and second UV beams can be equalized or set to predetermined levels.</p> |
