发明名称 AN APPARATUS AND METHOD OF USING AN IMAGING DEVICE FOR ADJUSTMENT OF AT LEAST ONE HANDLING DEVICE FOR HANDLING SEMICONDUCTOR COMPONENTS
摘要 Disclosed is an apparatus for handling electronic components. The apparatus comprises: 5 i) a rotary device and a plurality of pick heads arranged circumferentially around the rotary device, each pick head being operable to hold an electronic component; ii) a position-determining device for determining an arrangement of the electronic components as held by the respective pick heads; iii) a fiducial mark arranged in a position that is indicative of the arrangement of the electronic 10 components, as determined by the position-determining device; iv) a first imaging device arranged relative to the fiducial mark; and v) at least one handling device for handling the electronic components. Specifically, the first imaging device is operable to capture at least one image comprising the fiducial mark and the at least one handling device so that a position of the at least one handling device is adjustable to align the at least one handling device with respect to the 15 arrangement of the electronic components, based on an offset between the fiducial mark and the at least one handling device as derived from the at least one image captured by the first imaging device. A method of adjusting the position of at least one handling device of an apparatus for handling electronic components is also disclosed.
申请公布号 PH12014000181(A1) 申请公布日期 2016.05.23
申请号 PH12014000181 申请日期 2014.06.25
申请人 ASM TECHNOLOGY SINGAPORE PTE LTD. 发明人 SIU, HING SUEN;CHEUNG, YU SZE
分类号 G01R31/26 主分类号 G01R31/26
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