| 摘要 |
<p>The invention has for its object to provide an organic EL display fabrication system and method which are well compatible with a substrate having a relatively large area and ensure a small film-thickness distribution, high material usage efficiency, a high practical rate during film formation and a constant doping concentration, and so enable organic EL display devices of high quality to be mass-fabricated with efficiency yet at low cost. The fabrication system comprises a substrate on which said organic EL display device is to be formed, a means for rotating said substrate, an evaporation source for a host material and an evaporation source for a guest material. An n value is 3 to 10 for the evaporation source for a host material and 8 to 18 for the evaporation source for a guest material as given by an approximate equation m/m0 = (L0/L)<2>.cos<n> &thetas; where m0 is the vapor density at a center on an opening in each evaporation source and at a distance Lo from the opening and m is the vapor density at any position located at a radial angle &thetas; from the center line of the opening and spaced away from the opening by a distance L. The evaporation source for a host material is positioned with respect to the center of the substrate such that the evaporation source is located at a position that is 1.0 to 2.0 times as long as the center-to-end distance of the substrate. The evaporation source for a guest material is positioned with respect to the center of the substrate such that the evaporation source is located at a position that is 0.5 to 1.0 time as long as the center-to-end distance of the substrate. The vertical distance from the opening in each evaporation source to a plane including a substrate surface is 1.0 to 3.5 times as long as the center-to-end distance of the substrate. The evaporation source for a host material and the evaporation source for a guest material are simultaneously used for simultaneous evaporation of at least two materials. In the fabrication method of the invention, this system is used for evaporation.</p> |
