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发明名称
NON-DESTRUCTIVE ANALYSIS OF A SEMICONDUCTOR USING REFLECTANCE SPECTROMETRY
摘要
申请公布号
EP1078217(A1)
申请公布日期
2001.02.28
申请号
EP19990917648
申请日期
1999.04.20
申请人
CHERKASSKY, ALEXANDER P.
发明人
CHERKASSKY, ALEXANDER P.
分类号
G01B11/06;G01N21/00;G01N21/35;H01L21/66;(IPC1-7):G01B11/02
主分类号
G01B11/06
代理机构
代理人
主权项
地址
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