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经营范围
发明名称
Plasma processing apparatus
摘要
申请公布号
GB0100958(D0)
申请公布日期
2001.02.28
申请号
GB20010000958
申请日期
2001.01.13
申请人
SURFACE TECHNOLOGY SYSTEMS LIMITED
发明人
分类号
H05H1/46;H01J37/32;H01L21/3065
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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