ENERGY TRANSFER SYSTEM AND METHOD FOR THERMAL PROCESSING APPLICATIONS,申请号EP19990920023-传众专利搜索

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发明名称	ENERGY TRANSFER SYSTEM AND METHOD FOR THERMAL PROCESSING APPLICATIONS
摘要
申请公布号	EP1078113(A1)	申请公布日期	2001.02.28
申请号	EP19990920023	申请日期	1999.04.26
申请人	CVC, INC.	发明人	LEE, YONG, JIN;MOSLEHI, MEHRDAD, M.;KAMALI, JALIL;BELIKOV, SERGEY
分类号	C23C16/48;H01L21/00;(IPC1-7):C23C16/48	主分类号	C23C16/48
代理机构		代理人
主权项
地址

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