| 摘要 |
PROBLEM TO BE SOLVED: To execute measurement of displacement of a cantilever by an extremely simple means, of, resistance measurement, and to avoid complication of a system, and to improve versatility by enabling simplification and miniaturization of the whole constitution. SOLUTION: In this mass detection type gas sensor 1, concerning detection, deflection of a cantilever 2 caused by absorption of specific gas is measured as electric change quantity of a piezo resistance element 4 installed on a proper position. In this case, in the mass detection type gas sensor 1, a heater element 5 is installed additionally on an adsorption part 3 or on the periphery thereof, to evaporate and remove the specific gas, and correction is executed in the state where the cantilever 2 does not adsorb the specific gas. Hereby, measurement of displacement of the cantilever 2 can be executed by an extremely simple means, of resistance measurement, to avoid complication of a system, and to enable simplification and miniaturization of the whole constitution.
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