发明名称 |
Airflow control valve for a clean room |
摘要 |
An airflow control valve for a clean room having a duct section with a damper positioned within the duct. The damper being capable of an adjustment from an open position to a closed position. The opening and closing of the duct is accomplished through a magnetic coupling such that the duct can remain sealed during operation. The airflow control valve includes a sensor for measuring the airflow rate, so that the duct can be adjusted to maintain one or more predetermined flow rate set-points.
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申请公布号 |
US6192922(B1) |
申请公布日期 |
2001.02.27 |
申请号 |
US19990323591 |
申请日期 |
1999.06.01 |
申请人 |
SYNETICS SOLUTIONS INC. |
发明人 |
MACGIBBON BRUCE S.;WOLOCHUK MARK C.;WOLOCHUK LEE I.;SIROVY CHRISTOPHER P.;LEBARON JAMES F.;YARROLL JEFFREY W. |
分类号 |
F16K3/08;F24F3/16;F24F13/14;G05D7/06;(IPC1-7):G05D7/06 |
主分类号 |
F16K3/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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