发明名称 Method for forming a self-aligned BJT emitter contact
摘要 A bipolar transistor includes a collector region, an intrinsic base region within the collector region, an extrinsic base region within the collector region, and a base link-up region within the collector region between the intrinsic base region and the extrinsic base region. An emitter region is positioned within the intrinsic base region. A base electrode overlays and is in electrical communication with a portion of the extrinsic base region and the base link-up region, and a doped inter-polysilicon dielectric layer overlays a portion of the base electrode. A capping layer is positioned above the inter-polysilicon dielectric layer; and an emitter electrode overlays the inter-polysilicon dielectric layer and the emitter region. The doped inter-polysilicon dielectric layer is the dopant source for forming the extrinsic base region and the base link-up region.
申请公布号 US6194280(B1) 申请公布日期 2001.02.27
申请号 US19990262389 申请日期 1999.03.04
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 JOHNSON F. SCOTT
分类号 H01L21/331;(IPC1-7):H01L21/331 主分类号 H01L21/331
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