发明名称 Method and apparatus for spectrally broadening radiation.
摘要 A spectrally broadened radiation apparatus, including a laser configured to emit, through an output of the laser, radiation substantially only in the visible region of the electromagnetic spectrum, the radiation having a nominal wavelength, and an optical fiber optically coupled to the output of the laser, the optical fiber having an input to receive the radiation from the laser and having an output to provide spectrally broadened output radiation, the optical fiber configured to spectrally broaden the radiation from the laser to a spectral width of at least 0.5 nm around the nominal wavelength.
申请公布号 NL2015269(A) 申请公布日期 2016.07.08
申请号 NL20152015269 申请日期 2015.08.05
申请人 ASML HOLDING N.V. 发明人 KING PUI LEUNG;TAO CHEN;KEVIN J. VIOLETTE
分类号 G03F7/20 主分类号 G03F7/20
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