| 摘要 |
PROBLEM TO BE SOLVED: To accurately form up a component member for a micro-mechanism, namely each very fine structural body by letting any stress be hardly incurred in a silicone layer, or letting any stress be intentionally controlled. SOLUTION: In a method for manufacturing a component member for a micro-mechanism in which structural bodies 10 and 11 are formed out of a silicone layer by applying a sacrifice layer 2 over a substrate, also applying a silicone layer over the sacrifice layer, and removing the sacrifice layer out of the lower side of at least one part 11 of each structural body, doping is applied to the silicone layer by means of an inplantation process.
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