| 摘要 |
PROBLEM TO BE SOLVED: To achieve improvement in reliability on electrical connection of wiring and decrease in electric resistance while suppressing cost rise as much as possible.SOLUTION: A piezoelectric elements 39 has piezoelectric parts 37, a lower electrode 31 disposed on lower faces of the piezoelectric parts 37, and an upper electrode 33 that is disposed on upper faces of the piezoelectric parts 37 and opposes the lower electrode 31 across the piezoelectric parts 37. To the lower electrode 31 of each piezoelectric element 39 is connected wiring 35 formed of gold. Below the wiring 35 is laminated and arranged a metal part 43 formed of a metal material different from gold.SELECTED DRAWING: Figure 4 |
