发明名称 Method for reducing aliasing effects in scanning beam microscopy
摘要 A method for reducing aliasing effects in scanning beam microscopy, comprises generating a plurality of successive images of the same object, wherein each image is shifted in the vertical direction with respect to the preceding one by a sub-pixel distance and then averaging all the images together.
申请公布号 US6194718(B1) 申请公布日期 2001.02.27
申请号 US19980158826 申请日期 1998.09.23
申请人 APPLIED MATERIALS, INC. 发明人 DOTAN NOAM
分类号 H01J37/22;H01J37/28;(IPC1-7):G01N23/00 主分类号 H01J37/22
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