发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING IT
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device where the same fine processing technique is used for processes through which memories and logics are formed. SOLUTION: Contact holes used in a memory and a logic are set uniform in diameter when a contact hole 22 is bored, by which processing can be carried out through one lithography process. Through an insulating film forming process which is carried out after a contact hole 22 is bored, only a contact hole bored in a memory A is lessened in diameter, and a gate electrode 16 and the contact hole 22 are ensured of insulation properties by an insulating film side wall which is formed on the side wall-of the contact hole 22.
申请公布号 JP2001057347(A) 申请公布日期 2001.02.27
申请号 JP19990230867 申请日期 1999.08.17
申请人 TOSHIBA CORP 发明人 CHIKAMATSU NAOHITO
分类号 H01L21/8234;H01L21/28;H01L27/088;H01L27/10;(IPC1-7):H01L21/28;H01L21/823 主分类号 H01L21/8234
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