| 摘要 |
PROBLEM TO BE SOLVED: To provide a cantilever capable of detecting directly a displacement change of a search needle head. SOLUTION: A cantilever 142 has a lever part 140 having a shape of a beam with both ends fixed and made of single crystal silicon, and a roughly triangular pyramid-shaped probe needle part 138 is formed on the center of the lever part 140. The lever part 140 is supported by a first support part 114, and the first support part 114 is supported by a second support part 136 through a silicon oxide film 104. The surface 286 of the lever part 140 on the opposite side of the probe needle part 138 is faced directly to the first support part 114 side, and a groove is formed in the normal direction of the surface 286. Displacement of the probe needle part 138 caused by the change of irregularities on the sample surface is shown as displacement of the surface 286 of the lever part 140 as it is. Therefore, accurate irregularity information on the sample surface can be obtained by detecting the displacement of the surface 286 of the lever part 140.
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