| 摘要 |
PROBLEM TO BE SOLVED: To provide a microlens substrate which allows the exact bonding to a drive substrate. SOLUTION: A protective film of chromium is deposited on the surface of a glass substrate 1 and is patterned with circular openings 2 by which an opening mask 3 is formed. Also, superposition markers X4 are formed in the same staged as for this stage. Next, an etching resistant film 5 is brought into tight contact therewith so as to cover the superposition markers X4 and is subjected to wet process etching, by which hemispherical recessed parts 6 are formed. Further, the opening mask 3 and the etching resistant film 5 are successively peeled. Finally, a high-refractive index material 7 is packed into the recessed parts 6 and cover glass 8 is bonded thereto, by which the microlens substrate 9 is obtained. |
