发明名称 High yield semiconductor device and method of fabricating the same
摘要 A unit cell of a static random-access memory includes a laminated gate electrode structure adjacent to a diffusion layer. A top surface of the gate electrode structure is coated with a first silicide layer and the diffusion layer includes a second silicide layer. The second silicide layer is separated from the gate electrode structure by a distance that is the same as a width of a sidewall spacer on an opposite side of the gate electrode structure. The portion of the diffusion layer that is exposed between the second silicide layer and the gate electrode structure has a higher impurity concentration than the remainder of the diffusion layer to reduce or eliminate undesired leakage voltage.
申请公布号 US6194261(B1) 申请公布日期 2001.02.27
申请号 US19990255695 申请日期 1999.02.23
申请人 NEC CORPORATION 发明人 IMAI KIYOTAKA
分类号 H01L21/28;H01L21/768;H01L21/8244;H01L27/11;H01L29/78;(IPC1-7):H01L21/823 主分类号 H01L21/28
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