| 摘要 |
PROBLEM TO BE SOLVED: To measure the pole to almost all of regions over the whole region from a region with a tilt angle to an in-plane diffraction region by a reflection method. SOLUTION: A sample S is rotated around the predeterminedΩaxis passing the center O of a goniomotor to set the incidence angleωof X-rays to the surface Sa of the sample S. An X-ray detector 1 is rotated by 29 around theΩaxis along the plane crossing theΩaxis at a right angle and also rotated by 2θx around the center O of the goniometer along the plane including theΩaxis and crossing the above mentioned plane at a right angle to be arranged in the emitting angle direction of X-rays equal to the incidence angle of X-rays to the sample surface Sa. In this state, the sample S is rotated in-plane to measure the pole distribution of the sample S.
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