| 摘要 |
PROBLEM TO BE SOLVED: To manufacture a flat discharge tube having a large area without having to increase the thickness of glass. SOLUTION: In this manufacturing method, a discharge tube container 12 is installed removably in a vacuum container 11, the inside of the discharge tube container 12 is evacuated by pumps 41, 42 through a flow control valve 35 and an exhaust valve 39 in the closed state of feeding valves 43, 47, the inside of the vacuum container 11 is similarly evacuated by a pump 46, through a flow control valve 36 and an exhaust valve 45, pressures PS, PP in the respective containers 12, 11 are measured with pressure gauges 37, 38, respectively, and at least one of the control valves 35, 36 is controlled by a flow regulator control device 49 so that PP follows PS. Nitrogen gas is fed to the container 11 also in feeding a discharge gas to the container 12, and the control is carried out so that PP follows PS.
|
