Thermal control apparatus for two-axis measurement system

摘要

A two-axis measurement system for use with an article under test (AUT) is provided with a thermal control system to maintain the measurement system at a stable temperature. The thermal control system may be use a temperature-controlled fluid, such as liquid or gas, conducted through the measurement system. The measurement system further comprises a field probing sensor that is adapted to be positioned at a plurality of points spaced from the AUT to perform a measurement of the AUT. The probing sensor is manipulated by at least a first member extending in a first axial direction and a second member extending in a second axial direction perpendicular to the first axial direction. A near-field measurement of the AUT is performed by moving the field probing sensor in a pattern in front of the AUT to sample the RF energy of the AUT at a plurality of points. Internal passageways provided through the first and second members permit communication of the temperature-controlled fluid therethrough.