| 摘要 |
PURPOSE: A method and an apparatus for calibrating temperature measurements and measuring currents are provided to calibrate an optical probe in order to realize accurate temperature reading when a system is exposed to thermal radiation from a heated substrate, in the case where a temperature measuring system is initially introduced in an rapid thermal processing(RTP) apparatus. CONSTITUTION: A calibration current source(70) preferably includes a biasing circuit(72), an output transistor current source(74), and an offset circuit(76). In the temperature calibrating method, a calibration table is generated by applying a plurality of input signals to a calibration current source(70) to produce a plurality of output signals. Then, the calibration table is stored. When an output signal of a photodetector is received, the calibration input signal corresponding to the received photodetector output signal is determined based upon the stored calibration table.
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