发明名称 |
AUXILIARY APPARATUS FOR EXCHANGING FILTERS IN CLEAN ROOM |
摘要 |
PURPOSE: An auxiliary apparatus for exchanging filters in a clean room is provided to prevent a manufacturing line from being contaminated in exchanging filters and to easily replace a damaged filter, by effectively block a flow of air near upper and lower portions of a filter frame. CONSTITUTION: A sealing expansible material surrounds an insertion frame and has an outer surface for sealing at least one portion of an inner surface of a filter frame(28). At least one sealing insertion material is mounted near the outer surface of the sealing material and formed to seal the inner surface of the filter frame.
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申请公布号 |
KR20010014851(A) |
申请公布日期 |
2001.02.26 |
申请号 |
KR20000023113 |
申请日期 |
2000.04.29 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
KEUREIGROPEU |
分类号 |
H01L21/02;B01D46/00;B01D46/10;B01D46/24;B01D46/42;B01D46/44;F24F3/16;(IPC1-7):H01L21/02 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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