发明名称 AUXILIARY APPARATUS FOR EXCHANGING FILTERS IN CLEAN ROOM
摘要 PURPOSE: An auxiliary apparatus for exchanging filters in a clean room is provided to prevent a manufacturing line from being contaminated in exchanging filters and to easily replace a damaged filter, by effectively block a flow of air near upper and lower portions of a filter frame. CONSTITUTION: A sealing expansible material surrounds an insertion frame and has an outer surface for sealing at least one portion of an inner surface of a filter frame(28). At least one sealing insertion material is mounted near the outer surface of the sealing material and formed to seal the inner surface of the filter frame.
申请公布号 KR20010014851(A) 申请公布日期 2001.02.26
申请号 KR20000023113 申请日期 2000.04.29
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KEUREIGROPEU
分类号 H01L21/02;B01D46/00;B01D46/10;B01D46/24;B01D46/42;B01D46/44;F24F3/16;(IPC1-7):H01L21/02 主分类号 H01L21/02
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