| 摘要 |
PURPOSE: An object-mounting table is moved in a vacuum chamber through a means present in its outside by providing a positioning means for moving a sliding seal, to move thereby the object mounting table in the vacuum chamber. CONSTITUTION: A vacuum chamber V is surrounded by walls (11) defining openings (11a) provided in its floor. The vacuum chamber V is kept at a sufficient vacuous level by a proper type of vacuum pump. The openings (11a) are sealed with a sliding seal formed out of a sliding seal plate (12), and a wafer support pillar (13) is provided in the intermediate of the sliding seal plate (12). The pillar (13) supports a fine stage, i.e., a short-stroke wafer support chuck (14) for carrying the wafer W. A long-stroke motion, whereby the wafer W is positioned below the lens of a lithographic projection apparatus for exposing to a light the various regions of the wafer W, is achieved by causing the whole of the sliding seal plate (12) to move.
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