| 发明名称 |
SUBSTRATE HEATING APPARATUS WITH GLASS-CERAMIC PANELS AND THIN FILM RIBBON HEATER ELEMENT |
| 摘要 |
A substrate heating apparatus having a housing forming a substrate receiving chamber and a heater (24) located inside the chamber. The heater has a thin film flat ribbon heater element (38) sandwiched between two glass-ceramic panels (36, 37).
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| 申请公布号 |
KR20010014102(A) |
申请公布日期 |
2001.02.26 |
| 申请号 |
KR19997012151 |
申请日期 |
1998.05.19 |
| 申请人 |
BROOKS AUTOMATION INC |
发明人 |
HOLDEN SCOTT C;ASDIGHA MEHRAN;MOSCHINI LAWRENCE R;DILMAGHANI DARIUS;VALENZA MARIO |
| 分类号 |
H05B3/86;F27D11/02;H01L21/00;H05B3/00;H05B3/10;H05B3/12;H05B3/68;(IPC1-7):H01H19/00 |
主分类号 |
H05B3/86 |
| 代理机构 |
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代理人 |
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