发明名称 |
DRYING NOZZLE, DRYING APPARATUS AND WASHING APPARATUS USING THE SAME |
摘要 |
PURPOSE: To provide a drying nozzle to realize a high-efficiency drying apparatus capable of drying an object to be treated sufficiently. CONSTITUTION: In the drying nozzle 1, a drying gas feeding part 2 provided with an air feeding tube 9 for feeding air for drying a base plate 10 by jetting toward a surface of the base plate 10 in a state of the surface wet with liquid 21 and a gas-liquid mixture discharging part 3 for stabilizing a liquid thickness of the liquid adhering to the surface of the base plate 10 before drying and provided with a porous material 19 having a large quantity of perforation and disposed apart from the surface of the base plate 10 at a specified distance for discharging a gas-liquid mixture of air and the liquid from the surface of the base plate 10 are provided side by side in a direction along the surface of the base plate 10.
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申请公布号 |
KR20010015181(A) |
申请公布日期 |
2001.02.26 |
申请号 |
KR20000038296 |
申请日期 |
2000.07.05 |
申请人 |
FURONTEKKU:KK |
发明人 |
MIMORI KENICHI;HAGA NOBUAKI |
分类号 |
H01L21/304;F26B13/28;F26B21/00;H01L21/00;(IPC1-7):H01L21/304 |
主分类号 |
H01L21/304 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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