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发明名称
PROCESS FOR THE REMOVAL OF COPPER AND OTHER METALLIC IMPURITIES FROM SILICON
摘要
申请公布号
KR20010013000(A)
申请公布日期
2001.02.26
申请号
KR19997010973
申请日期
1999.11.25
申请人
null, null
发明人
샤이브래리더블유.;비투스카리씨마엠.
分类号
H01L21/304;H01L21/306
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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