发明名称 DEVICE FOR INJECTING PLURAL MEDIA THROUGH PLURAL NOZZLES FOR MEDIA
摘要 PURPOSE: A device is provided to inject plural media from plural nozzles in order of time, to prevent dropping the media from the nozzles and to reduce mechanical or technical cost. CONSTITUTION: In this device, two or more media are injected from plural nozzles for median, each of which exists on each arm for medium. In such a case, the device possesses a suspending device for each arm for medium and plural nozzles for media are separately rotated around the same axis line(Z).
申请公布号 KR20010014578(A) 申请公布日期 2001.02.26
申请号 KR20000012651 申请日期 2000.03.14
申请人 SEZ SEMICONDUCTOR-EQUIPMENT ZNBEHOR FUR DIE HALBLEITER FERTIGUNG GESELLSCHAFT 发明人 SUMNITSCH FRANZ
分类号 B05C5/00;B05B15/10;B05C11/08;G03F7/16;G03F7/30;H01L21/027;H01L21/304;(IPC1-7):B05B7/00 主分类号 B05C5/00
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