| 摘要 |
PURPOSE: A fan filter unit is provided to effectively decrease the content of chemical material existing in atmosphere as well as expand air circulation space and save the consumption power of a fan drive motor. CONSTITUTION: An enclosure(13) has an air inlet(11e) for flowing external air in and an air outlet(12d) for discharging filtered air. A chemical filter(1) is mounted in the enclosure(13) for removing chemical substance existing in the external air. A dust filter(4) is mounted in the enclosure(13) for removing dust existing in the external air. A fan(3) is mounted in the enclosure(13) for flowing the external air in through the air inlet(11e) and discharging the filtered air from the enclosure. A bypassing path(2) is formed to return a portion of the external air passing through the chemical filter(1) to the upstream site of the fan without passing through the dust filter(4). |
