| 发明名称 |
VERY NARROW BAND LASER |
| 摘要 |
A very narrow band excimer laser. The very narrow bandwidth is achieved by using an etalon (44) as an output coupler in combination with a line narrowing element (18) located at the rear of the laser. Preferred embodiments are capable of producing 10 mJ laser pulses at 1000 Hz with a 95% integral bandwidth of less than 1.5 pm.
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| 申请公布号 |
KR20010013417(A) |
申请公布日期 |
2001.02.26 |
| 申请号 |
KR19997011418 |
申请日期 |
1998.05.14 |
| 申请人 |
CYMER INC;ERSHOV ALEXANDER I |
发明人 |
ERSHOV ALEXANDER I |
| 分类号 |
H01S3/223;G03F7/20;H01S3/08;H01S3/098;H01S3/1055;H01S3/137;H01S3/139;H01S3/225;(IPC1-7):G06F17/60 |
主分类号 |
H01S3/223 |
| 代理机构 |
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代理人 |
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| 地址 |
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