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发明名称
METAL AND METAL SILICIDE NITRIDIZATION IN A HIGH DENSITY LOW PRESSURE PLASMA REACTOR
摘要
申请公布号
KR20010013723(A)
申请公布日期
2001.02.26
申请号
KR19997011738
申请日期
1999.12.13
申请人
null, null
发明人
양,윤-엔잭;첸,칭-하;첸,이아-에르아더
分类号
C23C16/56;H01L21/28;H01L21/768
主分类号
C23C16/56
代理机构
代理人
主权项
地址
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