| 摘要 |
PURPOSE: A silicon carbide sleeve for a substrate support assembly is provided to support a substrate, such as the semiconductor wafer, etc. CONSTITUTION: The silicon carbide sleeve(130) covers substrate support members, such as an upwardly extending arms(114) of a substrate carrier(110), which is part of a substrate support assembly. The carrier(110) having the arms(114) holds a substrate spaced apart from a platform(120), such as a susceptor, etc., during loading and unloading of a processing chamber. A platform defines apertures(122) through which the arms(114) extend. The arms(114) are vertically movable through the apertures(122) with respect to the platform(120) and engage the substrate at the edge of the substrate or, alternatively, inwardly from the edge. |
