| 摘要 |
PURPOSE: An equipment for producing semiconductor product is provided to transfer semiconductor products efficiently and economically by providing a transfer system provided with a supply system, which travels at the same height as a loading/unloading station in a clean room and which is positioned above the walking height of an operator. CONSTITUTION: A supply system includes a roller conveyor(4) travels above the walking height of an operator and at the same height of a loading/unloading station(6), so that the operator can move freely on a floor(7) of a clean room, under the roller conveyor(4). All loading/unloading stations(6) are positioned at the same height on the floor(7) of the clean room, and in this case the height is three meters in general. The roller conveyor(4) travels immediately in front of each loading/unloading station.
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