摘要 |
<p>PROBLEM TO BE SOLVED: To provide a CNT electron source allowing low-voltage drive and having high reliability, and provide an easy manufacturing method for a low-cost CNT electron source. SOLUTION: This Schottky emitter cathode includes a filament 2 of a first high-melting point metal; a monocrystal needle 1 of a second high-melting point metal having a facet, joined to the filament 2; and a reservoir 3 disposed on at least one of the monocrystal needle 1, the filament 2 and the junction part between the monocrystal needle 1 and the filament 2. The reservoir 3 contains a phase-stabilizing element or compound stabilizing one phase of ZrO2 in a temperature range of 293-1800 deg. K, and ZrO2. The phase-stabilizing element or compound is not a contaminant to the monocrystal needle 1, and is a substance substantially not increasing a work function of any other facet of the monocrystal needle 1.</p> |