| 摘要 |
PROBLEM TO BE SOLVED: To establish stable measurement having no risk of being influenced by charge-up at all measuring points. SOLUTION: This electron microscope is composed of a power supply 21 for controlling the acceleration voltage, an electron gun 1 to emit an electron beam 1' at the acceleration voltage set by the power supply 21, an electron optical system to scan the surface of a sample 11 with the emitted electron beam 1', a retarding circuit 12 connected with the sample 11 and applying a retarding electric field to the part near the surface of the sample 11, a potentiometer probe 9 to measure the surface potential of the sample 11, and a feedback calculation circuit 30 to make a feedback to the power supply 21 on the basis of the obtained surface potential and the preset surface potential. |
