发明名称 WIRING TREATMENT METHOD IN CLEAN ROOM AND WIRING CABLE
摘要 PROBLEM TO BE SOLVED: To retard gas evolution from a wiring cable used in a clean room by covering the wiring cable with a polymer organic film with one side coated with an adhesive. SOLUTION: A wiring cable 1 is built in a clean room and supplies power and information. A tape-like film 2 with an adhesive is wound around the wiring cable 1 so as to stack in the lateral direction in a lateral winding adhesive seal process or a tape-like film 3 with an adhesive is wound around the wiring cable in the longitudinal direction in a longitudinal winding adhesive seal process to prevent leak of gas generating from the wiring cable 1. The films 2, 3 are films having gas barrier property not permeate organic gas, and as a polymer organic film, ethylene vinyl alcohol copolymer film, or a one-side metal vapor- deposited polymer organic film prepared by vapor-depositing aluminum on the one side of polyethylene, polypropylene, or polyester is listed.
申请公布号 JP2001052533(A) 申请公布日期 2001.02.23
申请号 JP19990220585 申请日期 1999.08.04
申请人 SHIMIZU CORP 发明人 SUZUKI YOSHINOBU;SUZUKI REI;ONO TADASHI;FUKUI SHOJI
分类号 H01L21/02;H01B7/02;(IPC1-7):H01B7/02 主分类号 H01L21/02
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