| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of an organic EL element enabling minute patterns to be formed accurately and easily in the event of mask evaporation, and to provide a device therefor. SOLUTION: A transparent electrode 12 with a prescribed shape is formed of a transparent electrode material, such as ITO, on a surface of a transparent substrate 10 made of glass, resin, or the like, a luminescence layer made of organic EL materials is layered on the transparent electrode 12 by a vacuum thin-film forming technique, and a back plate made of Al-Li, etc., having a prescribed shape and confronting the transparent electrode 12 is formed on a surface of the luminescence layer. In forming the luminescence layer, a mask 20 with a stripe-shaped opening 22 (22a, 22b) is provided, and as to the opening 22 in the mask 20, the opening part 22a on the substrate 10 side is formed larger in width than the opening part 22b on the side of evaporation sources for the organic EL materials. The mask 20 and the substrate 10 are inclined with the mask 20 aligned with the substrate 10, the evaporating direction of the organic EL materials is successively changed for evaporation, and a plurality of organic EL materials are evaporated onto different positions on a surface of the substrate 10 by using the single opening 22 in the mask 20.
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