| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin angular velocity sensor not required to form an electrode of comb-toothed structure for drive and detection, and capable of removing signals other than signals based on angular velocity impression. SOLUTION: This sensor is provided with a bending vibration piece 6 passing through between a first and second tuning fork pieces 2a, 2b and the third and fourth tuning fork pieces extended in a Y-axis-direction and in an opposed direction thereof from a base part 1 existing in an X-Y plane to be extended in a Y-axis-direction and in an opposed direction thereof respectively to be connected, driving electrodes 12a, 12b, 13a, 13b provided in the second and fourth tuning fork pieces 2b, 3b to primary-mode-tuning-fork-vibrate the first, second, third and fourth tuning fork pieces 2a, 2b, 3a, 3b within the X-Y plane, and a detection electrodes 10a, 10b, 11a, 11b for detecting a secondary mode of bending deformation within the X-Y plane of the vibration piece 6 generated to make a center of the fifth additional mass part 7, provided in the vibration piece 6, serve as a node, when angular velocity around a Z-axis is impressed. |
