| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for forming a resist for satisfactory adhesion, a working method for a substrate, and a filter structure. SOLUTION: An aluminum film 72 is inserted between a glass substrate 71 and a resist 73, so that adhesion between them is enhanced because of the high adhesion of the aluminum film 72. Thus peeling of the resist 73 is prevented, while a base body is etched satisfactory with the resist 73 as a mask. This method can also be applied to a color filter structure. |
