| 摘要 |
The present invention provides a linear evaporation deposition apparatus capable of uniformly depositing a thin film and fabricating a high resolution organic light emitting device (OLED). The linear evaporation deposition apparatus includes: a vacuum container including a slit extending in a first direction; an evaporation crucible inserted into the slit to be disposed inside the vacuum container, including a storage space to store a deposition material, being made of a conductive material, heating the deposition material to generate vapor, injecting the vapor through a plurality of nozzles parts each communicating with the storage space, and extending in the first direction; an induction heating coil generating an induced electric field, inductively heating the evaporation crucible, extending in the first direction, and being disposed outside the vacuum container to inductively heat the evaporation crucible; and a dielectric window coupled with a surrounding portion of the slit of the vacuum container to seal the vacuum container, being disposed between the induction heating coil and the evaporation crucible, passing through the induced electric field generated by the induction heating coil, and extending in the first direction. |
