| 摘要 |
PROBLEM TO BE SOLVED: To provide an analysis sample gathering unit for semiconductor vapor generator, capable of capturing high-temperature vapor as a condensation agent in composition as is, without using trapping agents such as pure water, etc., and provide an analysis processing method using the same. SOLUTION: This analysis sample gathering unit for a semiconductor vapor generator for analyzing a trace amount of impurity included in vapor generated by the device is connected to an external burning vapor generator for a semiconductor manufacture process. The analysis sample gathering unit comprises a receiver 1 for condensing and storing gathering vapor, a lid body 2 to which a vapor introduction pipe 4 is attached for detachably engaging with the receiver 1, and a coolant bath 3 for cooling the receiver 1 mounting the lid body 2 from the outside, and the vapor introduction pipe 4 extends downwardly of the interior of the receiver when mounting the lid body, and the end part is stationed in proximity to the bottom face of the receiver.
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