发明名称 METHOD AND DEVICE FOR EXPOSURE
摘要 PROBLEM TO BE SOLVED: To unify the communication standard for transmitting/receiving control information for simplified overall configuration of a device by connecting a control unit and a main control part to a communication network of the same communication standard. SOLUTION: A main computer 1 and control units 31-41 are so connected to a communication network 21 as a radial start form with a hub 20 as a center for communication control. TCP/IP protocol is used as a data communication standard for the data communication between the main computer 1 and control units 31-41 as well as for the data communication between the control units 31-41. Thus, the communication standard for transmission/reception of control information is unified, and the overall configuration of a device is simple even if the number of control units increases. Further, the software for a control program is unified for easier generation/correction of the program, resulting in reduced load on development/maintenance for hardware and software.
申请公布号 JP2001052992(A) 申请公布日期 2001.02.23
申请号 JP19990229493 申请日期 1999.08.13
申请人 NIKON CORP 发明人 KOITABASHI HIDEKI
分类号 H01L21/027;G03F7/20;(IPC1-7):H01L21/027 主分类号 H01L21/027
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